https://www.sciencedaily.com/releases/2019/01/190116110955.htm

Researchers at The University of Queensland have combined modern nanofabrication and nanophotonics techniques to build the ultraprecise ultrasound sensors on a silicon chip.

Professor Warwick Bowen, from UQ's Precision Sensing Initiative and the Australian Centre for Engineered Quantum Systems, said the development could usher in a host of exciting new technologies.